The M1, M1 Pro, and M1 Max are fabricated on a 5-nanometer process.

In addition, the performance and efficiency gains compared to the M1 generation are a lot smaller.

The company elaborates that Apple will use 5nm chips for new Apple silicon coming in 2022.

M1, M1 Pro, and M1 Max: M1 Family Processors

A report also suggests that 3nm chips are not coming in 2022 due to some production issues.